批量生產(chǎn)/實驗室用臥式爐：
- From experimental usage to mass production, various equipment configuration is available
- Batch:25 to 150 wafers processing is available
- 1 to 4 stacks furnace configuration is implemented for taking advantage of limited square available
- 2 to 8 inch and 300mm wafer size are available
- LGO heater for Low and medium high temperature, HGC heater for high temperature are provided for excellent temperature performance
- Proposing equipment configuration according to the customer’s needs based on usage, space, and budget
- Simple and well equipped control system
| Heater | LGO heater, HGC heater | |
|---|---|---|
| LGO heater (Operation temp.) | H40×117/175 (400~1150℃) | |
| HGC heater (Operation temp.) | 16×86 (400~1200℃) | |
| Flat zone length | 250/800 | |
| Wafer size | to 300 mm | |
| Temp. control | 3 Zone | |
| Transfer equipment | Boat elevator, Boat loader, Cantilever loader, Soft loader |
