這款高承載直驅直線平移臺是高精度線性直驅平移臺Direct Drive Linear Translation Stage,采用光學編碼器和3相無鐵線性無刷伺服電機技術,為用戶帶來零反沖高精度平移運動,具有*的平移精度高,重復精度高和摩擦低的特點。
高承載直驅直線平移臺采用線性非接觸式光學編碼器作為反饋系統(tǒng),使得位置控制高達亞納米級分辨率。
高承載直驅直線平移臺采用自然老化鋁合金確保了平移臺高溫穩(wěn)定性和輕巧性,以及優(yōu)良的長周期運動,導軌系統(tǒng)不會發(fā)生漂移。
高承載直驅直線平移臺可以用于潔凈空間環(huán)境或真空度10^-3Torr的真空環(huán)境,也可根據用戶要求提供高真空直驅平移臺。
高承載直驅直線平移臺可以輕松地直接連接到光學平臺上,可直接安裝搭建成電動XY二維平移臺,無需使用任何連接板。
高承載直驅直線平移臺還可以安裝到花崗巖龍門架或高精度平臺上實現(xiàn)高精度平移定位。

圖1：高承載直驅直線平移臺實物圖
高承載直驅直線平移臺特點
直接驅動無反沖backlash系統(tǒng)
+/-0.5um雙向重復定位精度
高分辨率非接觸式光學編碼器
高精度線性導向和運載系統(tǒng)
超長使用壽命
方便集成到各種平臺或光學機械系統(tǒng)中
XY二維位移臺的正交性高達<=5arcsec
非常適合激光打標,激光鉆孔,激光劃線,激光雕刻等應用
具有灰塵防護能力
高承載直驅直線平移臺規(guī)格

Model	8MTL220-400-LEn1	8MTL220-600-LEn1
Kinematics & Feedback information
Travel Range, mm	400	600
Encoder Type	Optical
Encoder Model	LEN1
Encoder Resolution	Any of the range: 25 nm to 5 µm (on demand)
Encoder Interface	Differential RS422
Internal Multiplier	YES
Multiplication factor 1)	4-200 (on demand)
Encoder Grating Period, µm	20
Reference Mark (Index)	Yes
Absolute Accuracy 2)
Before Calibration, µm	±10	±12
After Calibration, µm	±1	±1
Uni-Directional Repeatability, µm	N/A
Bi-Directional Repeatability (peak to peak) 2), µm	±0.5
Bi-Directional Repeatability (RMS) 2), µm	±0.26
Pitch 3), µrad / arcsec	±30 / ±6.20
Yaw 3), µrad / arcsec	±30 / ±6.20
Roll, µrad / arcsec	N/A
Maximum Velocity (with load 4kg) 4), mm/s	<2000
Maximum Acceleration (with load 4kg) 5), mm/s2	<20000
Limits Switches Type (Safety)	Optical (Optrons)
Limit Switch Polarity (Safety)	Pushed is closed
Limit Switch Voltage, V	5…24
Load, Guiding & Transmission Information
Design Type	Linear Motor Stage
Linear Motor Model	LM4
Linear Motor Design Type	Ironless BLDC motor
Maximum Bus Voltage, VDC	>300
Load Capacity (Centrally Placed) 6)
Horizontal, kg	100
Vertical, kg	N/A
Moving Mass 7), kg	9.5
Guiding System	Recirculating linear rails and carriages units with caged balls
Material & Environment Conditions
Housing Material	Aluminum Alloy
Housing Coating (Finish)	Black Anodizing
Environment Pressure	Normal Atmosphere
Operating Temperature, °C	20±2
Control, Communication and Cabling
Recommended Controllers 8)	ACS Products Line or 8SMC5-USB series
Recommended Drivers 8)	ACS Products Line or 8SMC5-USB series
Recommended Power Supply 9)	2 phase / 3 phase source
Recommended Communication Interface 12)	EtherCAT / RS232 / USB / TCP-IP
Cable Length, m	2 (other by request)
Differential Outputs 10)	On request
Accessories Information
Base Plate for Mechanical Interface	Not required
XY Stack	Directly
Z Configuration	Not available (choose from other Standa stages series)
Additional Details
Dimensions of Moving Platform (W x L), mm	225 x 225
Overall Linear Stage Dimensions (W x L x H), mm	780 x 297.5 x 100	980 x 297.5 x 100
Measurement System	Metric
Orthogonality (XY Configuration) 11), µrad / arcsec	24 / 5
Protection Level	From solid particles and spray
RoHS	Compliant
Weight, kg	37	46

1) 默認為x4轉PPR-脈沖數/每轉，模擬SIN/COS編碼器接口
2)精度和雙向重復定位精度采用Zygo ZMI 501 Michelson laser interferometer測量計算
3) Pitch & Yaw 采用 11D-ALI-COL 電子自相關儀器測試,電子自相關儀11D-ALI-COL分辨率1µrad. 環(huán)境誤差1µrad.
4) 速度由編碼器限制和驅動器CUT-OF頻率以及導向系統(tǒng)限制.
5)加速度由驅動器“Peak Current, Motors` Peak Current and External Load (inertia)決定.
6)負載能力由導向系統(tǒng)決定.
7) 運動質量是系統(tǒng)常數m₀,通常是沒有負載時的慣性。
8) 推薦的控制器和驅動器有助于發(fā)揮電動平移臺的性能.
9) 推薦的電源是根據用戶的占空比和負載來選擇.
10) 差分輸出接口,可提供主動或被動LCMv2接口.
11) 可組成正交性能更好的XY二維電動位移臺系統(tǒng).
12) 標量控制可采用USB / TCP-IP / RS-232通訊接口,矢量控制建議采用EtherCAT接口。
13) 平移臺包括特殊封蓋,可用于灰塵嚴重或濕度較大的環(huán)境