Acton紫外—— VUV/UV限波濾光片
多層反射濾光片是全介質(zhì)反射鏡，在特定的VUV通過UV波長提供高反射率，同時發(fā)射較長波長的紫外到紅外光。濾波器是為45度AOI設(shè)計的。
定制的峰值波長>250 nm的紫外濾光片可與DUV-VUV透過率低于~210 nm。
VUV/UV反射濾光片- Acton標(biāo)準(zhǔn)濾光片為45°AOI。
| Wavelength | Peak Reflectance | 1.0” Part Numbers | 1.5” Part Numbers | 2.0” Part Numbers |
|---|---|---|---|---|
| 126nm | ≥ 40% | M126-3045-1D | M126-3045-1.5D | M126-3045-2D |
| 146nm | ≥ 45% | M146-3045-1D | M146-3045-1.5D | M146-3045-2D |
| 157nm | ≥ 82% | M157-3045-1D | M157-3045-1.5D | M157-3045-2D |
| 172nm | ≥ 82% | M172-3045-1D | M172-3045-1.5D | M172-3045-2D |
| 185nm | ≥ 82% | M185-3045-1D | M185-3045-1.5D | M185-3045-2D |
| 193nm | ≥ 82% | M193-3045-1D | M193-3045-1.5D | M193-3045-2D |
| 200nm | ≥ 90% | M200-3045-1D | M200-3045-1.5D | M200-3045-2D |
| 208nm | ≥ 90% | M208-3045-1D | M208-3045-1.5D | M208-3045-2D |
| 212nm | ≥ 90% | M212-3045-1D | M212-3045-1.5D | M212-3045-2D |
| 220nm | ≥ 90% | M220-3045-1D | M220-3045-1.5D | M220-3045-2D |
| 240nm | ≥ 90% | M240-3045-1D | M240-3045-1.5D | M240-3045-2D |
| 248nm | ≥ 90% | M248-3045-1D | M248-3045-1.5D | M248-3045-2D |
| 254nm | ≥ 90% | M254-3045-1D | M254-3045-1.5D | M254-3045-2D |
| 260nm | ≥ 90% | M260-3045-1D | M260-3045-1.5D | M260-3045-2D |
| 266nm | ≥ 90% | M266-3045-1D | M266-3045-1.5D | M266-3045-2D |
| 280nm | ≥ 90% | M280-3045-1D | M280-3045-1.5D | M280-3045-2D |
| 300nm | ≥ 90% | M300-3045-1D | M300-3045-1.5D | M300-3045-2D |
| 320nm | ≥ 90% | M320-3045-1D | M320-3045-1.5D | M320-3045-2D |
| 340nm | ≥ 90% | M340-3045-1D | M340-3045-1.5D | M340-3045-2D |
| 352nm | ≥ 90% | M352-3045-1D | M352-3045-1.5D | M352-3045-2D |
| 360nm | ≥ 90% | M360-3045-1D | M360-3045-1.5D | M360-3045-2D |
注意: 在175nm以下的過濾器襯底材料是CaF2和在175nm以上的熔融石英Fused Silica
光譜曲線
注意：典型樣品的涂層性能曲線顯示。具體設(shè)計曲線，包括反射率和透過率可根據(jù)要求設(shè)計。
